Micromechanical component for use as micro-mirror device, has micro-oscillating device extended on surface along two directions to rotation axis and connected to two opposite ends based on one direction by suspension parts at substrate

摘要

The component (10) has a substrate (11), and a micro-oscillating device (20) e.g. micro-mirror, pivoted around a rotation axis (12) and connected to the substrate for oscillating the device. The device is extended on a surface along a direction (21) that is parallel to the rotation axis and along another direction (22) that is perpendicular to the rotation axis. The device is connected to two opposite ends (23, 24) according to the direction (22) by suspension parts (31, 32) e.g. torsion springs, at the substrate, where the suspension parts are parallel to the rotation axis.