CONTACT VIBRATION GAUGE AND SURFACE ASPECT MEASURING DEVICE EQUIPPED THEREWITH

摘要

PROBLEM TO BE SOLVED: To provide a contact vibration gauge and surface aspect measuring device equipped therewith, capable of measuring vibration to a frequency higher than responsible bandpass controlled by constant measuring force on examined objects and reducing the influence due to mass effect.;SOLUTION: The surface aspect measuring device equipped with a contact vibration gauge includes a force sensor 1 detecting measuring force generated during time of contact with examined objects to output as force detection signal; a drive actuator 133 for moving the force sensor 1, in response to the vibration of the examined objects; a probe 130 possessing a scale detector 135 for detecting position displacement information of the force sensor 1 to output as displacement signal; a force controlling loop RF for comparing force detection signal as force feedback signal with a force setting value to drive the actuator 133 so as to make the force feedback signal agree with the setting value; and a signal converter 240 for combining a force detection signal and the displacement signal to obtain oscillation amplitude of the examined objects.;COPYRIGHT: (C)2009,JPO&INPIT