METHOD AND APPARATUS THEREFOR FOR SIMULTANEOUSLY IMAGING SURFACE OF OBJECT TO BE MEASURED AND GRANULAR SPOT PATTERN BY LASER REFLECTED LIGHT

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus therefor for simultaneously imaging a granular spot pattern as the reflected light of irradiated laser light, and the surface of a part on which the laser is irradiated.;SOLUTION: The method irradiates the surface of the object 1 to be measured with laser light 4, allows the irradiated laser light to be reflected diffusely based on the state of the rough surface of the surface of the object 1 to be measured to generate a granular spot pattern in the air, and installs a dark field tube 8 for shielding external light and a convex lens 9 at a predetermined position in front of a CCD element 7, thereby simultaneously capturing an image in which the laser light is irradiated on the surface of the object 1 to be measured and the granular spot pattern.;COPYRIGHT: (C)2009,JPO&INPIT