PELLICLE, PELLICLE STORAGE CONTAINER STORING PELLICLE, AND METHOD FOR STORING PELLICLE IN PELLICLE STORAGE CONTAINER

摘要

PPROBLEM TO BE SOLVED: To store a large pellicle in a pellicle storage container without using a separator. PSOLUTION: A region not coated with a mask pressure-sensitive adhesive is provided in a part on an end face close to the mask pressure-sensitive adhesive of a pellicle frame; and the region not coated with the adhesive is mounted on a pellicle frame support comprising a silicone gel provided inside a pellicle storage container; and the pellicle frame is held and fixed to the pellicle storage container by a holding mechanism comprising pins inserted into holes formed in a side face of the pellicle frame. Since the pressure-sensitive adhesive layer can be protected without using the separator, a separator is unnecessary. PCOPYRIGHT: (C)2009,JPO&INPIT