MANUFACTURING METHOD OF OPTICAL SIGNAL PATH CHANGING DEVICE, AND OPTICAL SIGNAL PATH CHANGING DEVICE

摘要

PROBLEM TO BE SOLVED: To obtain an optical signal path changing device which is high in the reliability of an electric connection between an optical deflecting element and a wiring on a substrate, and to improve the manufacture yield of the optical signal path changing device.;SOLUTION: In the case of manufacturing the optical signal path changing device, which includes the optical deflecting element, an incident portion and a projection portion for light, and a substrate mounted with the wiring for applying a voltage to one surface of the optical deflecting element, a solvent-free conductive paste containing an addition type thermosetting compound and a conductive material is sandwiched between the electrode on the one surface of the optical deflecting element and the wiring, and half-cured into a half-cured body having a glass transition point not higher than 0°C, and an underfill agent is flowed into a space formed between the optical deflecting element and substrate as the optical deflecting element is mounted on the substrate; and then an optical waveguide is positioned, the underfill agent is cured, and the conductive paste is subjected to final curing.;COPYRIGHT: (C)2009,JPO&INPIT