METHOD OF CREATING LITHOGRAPHIC DATA, AND LITHOGRAPHIC APPARATUS USING CHARGED PARTICLE BEAMS

摘要

PROBLEM TO BE SOLVED: To provide a method of creating area-divided lithographic data available to a multi-column apparatus.;SOLUTION: The method of creating lithographic data related to one embodiment of the present invention is to create pattern data to be drawn on samples by a lithographic apparatus having a plurality of columns to irradiate electronic beam. The method includes a process of entering information of optical central distances of the plurality of columns, a process of virtually dividing a drawing area indicated by layout data with a width obtained by dividing the distance indicated by distance information by an integer into a plurality of small areas, a process of converting the format of the small area-divided layout data into a format adaptive to the lithographic apparatus and creating area-divided lithographic data for each small area, and a process of outputting the lithographic data.;COPYRIGHT: (C)2009,JPO&INPIT