PROCESS CONTROL SYSTEM, METHOD FOR MANAGING PROCESS IMPLEMENTATION DEVICE, METHOD AND PROGRAM FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PPROBLEM TO BE SOLVED: To provide a process control system etc., which reduces processes of a host computer and facilitates maintenance of programs of the host computer. PSOLUTION: The process control system 21a includes a controller 31a, a stocker 32a, and a processing device 33a. The controller 31a acquires, from a host computer 11, a first information group including information associated with a plurality of processes for manufacturing a product, acquires a second information group including information uniquely generated in at least one of processes implemented in the processing device 33a, and controls the processing device 33a based upon the information of the first group and the information of the second group. PCOPYRIGHT: (C)2009,JPO&INPIT