SURFACE CONTAMINATION DEGREE EVALUATION METHOD AND SURFACE CONTAMINATION DEGREE EVALUATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a surface contamination degree evaluation method and a surface contamination degree evaluation device capable of evaluating a surface contamination degree even in a case where surface texture of analytes changes due to the nature of adsorbed contaminant.;SOLUTION: The surface contamination degree evaluation method evaluates a contamination degree of a surface 1a of an analyte 1 due to adsorption of contaminant in air for the analyte required to maintain a predetermined cleanliness degree, in which the adsorbed moisture amount at the surface 1a due to adsorption of water vapor in air is measured and the contamination degree at the surface 1a is evaluated based on the difference from the adsorbed moisture amount adsorbed at the surface 1a of a reference analyte 1.;COPYRIGHT: (C)2009,JPO&INPIT