COPPER ALLOY THIN FILM WITH EXCELLENT ADHESION, AND WIRE AND ELECTRODE FOR LIQUID CRYSTAL DISPLAY COMPOSED OF THE COPPER ALLOY THIN FILM AND USED FOR LIQUID CRYSTAL DISPLAY

摘要

PROBLEM TO BE SOLVED: To provide a copper alloy thin film for forming a wire and an electrode for a liquid crystal display.;SOLUTION: The copper alloy thin film with excellent adhesion has a component composition consisting of, by atom, 0.01 to 5% fluorine, 0.01 to 2.5%, in total, of one or more elements among Ca, Mg and Zn, and the balance Cu with inevitable impurities.;COPYRIGHT: (C)2009,JPO&INPIT