SUBMERGED OBSERVATION SENSOR AND SUBMERGED OBSERVATION DEVICE

摘要

PPROBLEM TO BE SOLVED: To observe a sample in a liquid by using a self-detection type probe without exerting any effect on the liquid. PSOLUTION: A submerged observation sensor 3 includes the self-detection type probe 2 which has a cantilever 30 having a probe 30a formed to its leading end and of which the base end side is supported on a body part 30b, a strain resistance element of which the resistance value changes corresponding to the displacement quantity of the cantilever and the wiring part 32 electrically connected to the strain resistance element, a flexible substrate 20 which has two insulating sheets 21 and the wiring pattern 22 patterned between both sheets, supports a body part while the cantilever is protruded to the outside and is formed into a long strip-like form so that at least one end side thereof is drawn out of the liquid, a connection member 23 for connecting the wiring part and the wiring pattern, a resin part 24 for covering the wiring part, the connection member and the electric connection place of the connection member and the wiring pattern and the external contact 22a formed to the end of the flexible substrate drawn out of the liquid. PCOPYRIGHT: (C)2010,JPO&INPIT