GLASS PLATE THICKNESS MEASURING INSTRUMENT AND GLASS PLATE THICKNESS MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a measuring instrument and a measuring method for measuring the thickness of a glass plate, on a microscopic level.;SOLUTION: This glass plate thickness measuring instrument 10 is equipped with a table 2, having a support surface 21 supporting a glass plate 6, an optical unit 5, and a movement means for causing laser light from the optical unit 5 to scan. On the support surface 21, grooves 22 which extend in a prescribed direction are provided, at positions corresponding to the scanning laser light, while suction holes 23 for vacuum-sucking the glass plate 6 are provided in a prescribed direction, at prescribed intervals.;COPYRIGHT: (C)2010,JPO&INPIT