TRUING TOOL OF GRINDING WHEEL AND ITS MANUFACTURING METHOD, TRUING DEVICE USING THE SAME, METHOD OF MANUFACTURING GRINDING WHEEL AND WAFER EDGE GRINDING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a truing tool of a grinding wheel which can improve the life of the grinding wheel and can machine a wafer edge so as to conform to quality standard, and its manufacturing method, a truing device using the same, a method of manufacturing a grinding wheel, and a wafer edge grinding device.;SOLUTION: The truing tool is used for correcting a groove of a precision grinding wheel for precisely grinding the wafer edge. The truing tool is composed of a truer which has the same inclination as the inclined surface of the groove of the precision grinding wheel and is formed in a shape corresponding to a cross sectional shape of the groove. The groove of the grinding wheel for precisely grinding the wafer edge is easily ground by using the truing tool.;COPYRIGHT: (C)2009,JPO&INPIT