METHOD OF MANUFACTURING FINE STRUCTURE, FINE STRUCTURE, DEVICE FOR RAMAN SPECTRUM, RAMAN SPECTROMETER, ANALYZING DEVICE, DETECTION DEVICE AND MASS SPECTROMETER

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a fine structure which enables easy production of a fine structure capable of forming a hot spot near metal fine particles without a step of densely disposing the metal fine particles with several-ten-nm or smaller gap therebetween.;SOLUTION: The method of manufacturing a fine structure is characterized by a step of dispersing and fixing the plurality of metal fine particles having a size capable of inducing localized plasmon on a surface of a substrate, a step of forming a metal film in a gap between the plurality of metal fine particles, wherein the metal fine particles have a portion in which an area of a cross-section of a cut face parallel to a surface of the substrate gets maximum, and have a shape such that the cross-sectional area reduces toward the surface of the substrate from the portion in which the cross-sectional area gets maximum, and wherein the metal fine particles get spaced apart from the metal film.;COPYRIGHT: (C)2009,JPO&INPIT