METHOD OF FILM-COATING NEUTRAL-DENSITY FILTER, APPARATUS FOR FORMING NEUTRAL-DENSITY FILTER, NEUTRAL-DENSITY FILTER USING THE SAME, AND IMAGE PICK-UP LIGHT QUANTITY DIAPHRAGM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a film coating method where, when film layer is formed in response to optical characteristics on substrate, gradation range layer can be stably formed on a plurality of substrates at the same time without variation.;SOLUTION: In the method of film-coating neutral-density filter where, in a film coating chamber, target is sputtered with a working gas, the plurality of targets at least composed of first and second substances with different optical properties is sputtered on substrate with the working gas, and a dielectric film layer and a metal film layer are formed, so as to be a stacked shape, the dielectric film layer is film-formed in such a manner that each target composed of a dielectric substance or a metal substance is sputtered with a working gas, so as to form a film on each substrate with sputtered particles, and thereafter, the formed film is irradiated with plasma, and a film is formed with the produced compound. Further, the metal film layer is film-formed in such a manner that each target composed of a metal substance is sputtered with a working gas, so as to form a film on the substrate with sputtered particles, or the formed film is irradiated with plasma, and a film is formed with the produced compound.;COPYRIGHT: (C)2009,JPO&INPIT