AIR CLEANER FOR ELIMINATING FINE PARTICLE OR FINE PARTICLE AND HARMFUL GAS IN SHEET-LIKE OBJECT MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an air cleaner for eliminating fine particles or fine particles and harmful gas keeping a laminar flow state without bounding of the clean gas, even if clean air impinges on an inner structure of an EFEM (Equipment Front End Module)and/or a sheet-like object treating chamber.;SOLUTION: A fan setting chamber 20 is provided downstream of the EFEM 2 and/or sheet-like object treating chamber 3, a suction fan 22 is provided in the fan setting chamber 20, and a local exhaust unit 14a formed by setting a filter 23 of high performance or the filter 23 combined with a chemical filter 24 is set downstream of the suction fan 22, and fine particles, or fine particles and harmful gas in the EFEM 2 and/or sheet-like object treating chamber 3 are eliminated by the local exhaust unit 14a and the clean air is exhausted into a clean room 1.;COPYRIGHT: (C)2009,JPO&INPIT