FLAW SORTING APPARATUS, FLAW SORTING METHOD AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a flaw sorting apparatus that enhances the sorting capacity of a flaw regardless of an increase in the number of image feature quantities, a flaw sorting method and a program.;SOLUTION: The flaw sorting apparatus is equipped with an image processing part 26 for extracting image feature quantities from the image data of an inspection target acquired from a visual examination device 15 and a multivariate analysis processing part 28 for calculating a contribution ratio by performing a main component analyzing method or method of partial least squares with respect to the image feature quantities of the inspection target extracted in the image processing part to extract the image feature quantities of high contribution ratio and to determine the kind of the flaw from the extracted image feature quantities. Since the image feature quantities reaching a high contribution ratio becomes the same in the case of the same kind of the flaw, the sorting of the flaw can be performed from a combination of the extracted image feature quantities.;COPYRIGHT: (C)2009,JPO&INPIT