PROBLEM TO BE SOLVED: To allow high-precision straightness measurement which does not require an auto collimator, a standard square, or a plurality of displacement detectors for correcting a movement error of a linear movement mechanism, does not require the separate installation of a displacement measuring apparatus for position detection in a stage movement direction, and has a simple, compact structure.;SOLUTION: The straightness measuring apparatus installs a displacement detector 32 for measuring relative displacement with respect to an object under measurement 8 in the linear movement mechanism 12 and measures the relative displacement with respect to the object under measurement while moving the displacement detector 32 in the direction perpendicular to the measurement direction of the displacement detector. The apparatus is provided with a two-dimensional displacement detector 72 which can collectively measure the amount of movement of the linear movement mechanism in the travel direction and the amount of movement of the linear movement mechanism displaced in the straightness direction of the object under measurement which occurs concurrently.;COPYRIGHT: (C)2009,JPO&INPIT
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