ARTICLE TO BE TRANSPORTED AND VIBRATION PROOF MECHANISM

摘要

PROBLEM TO BE SOLVED: To stably suppress vibration transmitted from a transporting means to a body via a grip means and a flange by using a configuration having durability, for example, in an article to be transported such as an FOUP for housing various substrates for manufacturing semiconductor elements.;SOLUTION: The article (100) to be transported is transported by a transporter (1) and gripped by a grip means (2a) provided on the transporter (1). The article (100) includes a body (11), a flange (12) to be gripped by the grip means, and a vibration absorbing means (13) disposed between the flange and the body and used to absorb vibration transmitted from the transporter to the body via the grip means and the flange.;COPYRIGHT: (C)2009,JPO&INPIT