DATA MANAGEMENT DEVICE, INSPECTION SYSTEM AND DEFECT REVIEWING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a data management device capable of shortening the inspection time even when design data of a semiconductor circuit are used.;SOLUTION: The data management device 100 is connected to an appearance inspecting apparatus 104a for detecting a defect candidate on a wafer and acquiring the coordinates of the defect candidate, a design data server 102 for storing the design data of the semiconductor circuit, and the defect reviewing apparatus 108a for imaging the defect candidate on the basis of the coordinates to acquire a defect candidate image, comparing the defect candidate image with a reference image without a defect and specifying a defect. The data management device comprises a first detection part 1 for detecting that the appearance inspecting apparatus 104a is executing the acquisition of the coordinates, a storage control part 2 for making write of the coordinates from the appearance inspecting apparatus 104a to a storage part 2a be started by the detection, and a defect peripheral design data acquisition part 3 for acquiring defect peripheral design data capable of generating the reference image so as to include the coordinates from a part of the design data. The storage control part 2 associates the defect peripheral design data with the coordinates and stores them in the storage part 2a.;COPYRIGHT: (C)2009,JPO&INPIT