ELECTROCHEMICAL GAS SENSOR, OPERATION ELECTRODE SUITABLE FOR THE SAME, AND DETECTION METHOD OF ARSINE USING ELECTROCHEMICAL GAS SENSOR

摘要

PROBLEM TO BE SOLVED: To provide an electrochemical gas sensor having a high detection sensitivity of arsine.;SOLUTION: The electrochemical gas sensor takes gas to be detected into an electrolyte via a water-repellent permeable diaphragm and detects the concentration of the gas to be detected by an electrolytic current flowing between an action electrode and a counter electrode formed in the water-repellent permeable diaphragm. The electrochemical gas sensor includes: a polycrystalline diamond film 51 in which the action electrode 5 has a thickness for permeating gas; and a gold (Au) layer 52 formed on one surface of the polycrystalline diamond film 51. The gold (Au) layer 52 is arranged in contact with the water-repellent permeable diaphragm.;COPYRIGHT: (C)2009,JPO&INPIT