METHOD OF MANUFACTURING THREE-DIMENSIONAL MOLD, THE THREE-DIMENSIONAL MOLD, WORKPIECE, AND RESIN MOLDED ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a method for efficiently manufacturing a three-dimensional mold having a periodic structure with a high aspect ratio, the three-dimensional mold obtained by the manufacturing method, a workpiece, and a resin molded article.;SOLUTION: The method of manufacturing the three-dimensional mold has at least a step of preparing a workpiece with a resist layer on a substrate, a first heating step, an irradiation step, a second heating step, and a developing step. The resist layer contains at least one of the hydrolysate and the condensate of alkoxysilane expressed by general formula (1): where R¹ represents a hydrogen atom or a monovalent organic group, R² represents a monovalent organic group, and n represents an integer of 1 to 3. In the second heating step, the resist layer is heated at 300°C or higher. Further, the three-dimensional mold obtained by this manufacturing method is used to manufacture the workpiece and the resin molded article.;COPYRIGHT: (C)2010,JPO&INPIT