The Johnson rabetsuku force-like electrostatic chuck which is driven at AC voltage

摘要

Topic The Johnson rabetsuku force-like electrostatic chuck which is driven at AC voltage is offered.SolutionsAt least the electrostatic chuck which has with the AC power source which supplies the AC voltage signal the induced electricity layer which possesses one territory and, at least one territory and correspondence vis-a-vis the electrode and the electrode which are attached is offered. Dielectric of induced electricity layer is set, when the AC voltage signal is impressed in the electrode, in order that the electrostatic force which pulls suffering processing ones vis-a-vis induced electricity layer is formed, in order to make charge-transfer possible in regard to induced electricity layer. Selective figure Figure 2