Magnesium (Mg) magnesium oxide (MgO) converting to the nitriding silicon powder where the temperature conduction

摘要

PROBLEM TO BE SOLVED: To obtain a sintered compact excellent in mechanical strength and having a high heat conductivity without anisotropy in the direction of heat conduction by including silicon nitride as a principal component, including aluminum and oxygen in specific values or below of contents as impurities and respectively regulating the heat conductivity and four-point bending strength at normal temperatures to specified values or above.;SOLUTION: This silicon nitride-based sintered compact is obtained by regulating the content of aluminum as an impurity element therein to ≤0.2 wt.% and the content of oxygen as an impurity element therein to ≤3.0 wt.% and further regulating the heat conductivity to ≥70 W/(m.K) and the four-point bending strength to ≥600 Pa. The amount of carbon in the sintered compact is preferably ≤2.0 wt.% and the total amount of magnesium and a group 3a element of the periodic table contained therein is preferably 0.6-4.0 wt.% The weight ratio (MgO/RExOy) thereof is preferably 1-70. The ratio of β-type silicon nitride grains having ≥5 μm minor axis diameter in the sintered compact is preferably ≤10 vol.%. When the sintered compact is used as a substrate for a semiconductor element, the thermal shock resistance and heat cycle resistance are improved to thereby provide a substrate material excellent in durability and reliability.;COPYRIGHT: (C)2001,JPO