Fluorine atom-containing polymerizable unsaturated monomer, fluorine atom-containing polymer compound and photoresist resin composition

摘要

PROBLEM TO BE SOLVED: To provide a new fluorine-containing polymerizable unsaturated monomer useful for obtaining a polymer having high transparency to a light of a wavelength not more than 300 nm, especially of vacuum ultraviolet light such as F₂ excimer laser (157 nm) etc.;SOLUTION: The fluorine-containing polymerizable unsaturated monomer is represented by formula (1a) or (1b), wherein rings Z¹ and Z² show each an alicyclic carbon ring; R¹, R² and R³ show each an alkyl group or a fluoroalkyl group; W shows a single bond or a linking group; R shows a specified unsaturated acyl group; provided that, in formula (1a), at least one of R¹ and R² etc., is a fluorine atom or a fluoroalkyl group and, in formula (1b), (i) a fluorine atom or a fluoroalkyl group is bound with the ring Z² or (ii) R³ is a fluoroalkyl group.;COPYRIGHT: (C)2005,JPO&NCIPI