Being manner in order can by the mannered null minute etching process substantially for level minute machine structure and the gap adjustment

摘要

The present invention relates to a method for adjusting the operating gap of the mechanical elements of the mechanical structure of the two substantially planar obtained by fine etching. Be attributed to (RF) fixed reference position in the direction of the residual gap separating the elements to one element (E) (A), elastically linked by (S) another element method, (OE) stop at least one defining the adjacent gap is the maximum amplitude of the displacement of another element in between (RF) and another element of the (OE) (C), fixed reference position can be connected to the (RF) fixed reference position - placing the block (D), adjacent positions constitute the operating position, until it is smaller than the resolution of fine etching step difference between adjacent gap residual gap to be reduced residual gap elastic link (S) consists of (DE) giving another element (OE) the displacement to antagonize. The present invention is applicable to electromechanical resonator.