The multipath reflection type duration of flight mass spectrometer which has crossing acceleration

摘要

The device which is disclosed has, the grid of pair is not the ion mirror (12), the drift space (13), the orthogonal ion accelerator (14), the deflecting system of option (15), the ion detector (16), the periodic lens of the deck (17), and the edge deflecting system (18) the multipath reflection type duration of flight mass spectrometer which it has (MR - TOF MS) (11). It is decided in order to improve the duty cycle of ion implantation at low repetition speed, various measures can take with the long flight MR - in TOF MS. The incident ion beam and the accelerator it is possible, the accelerator can tilt the early speed of the ion beam and, to direct to the direction which crosses substantially vis-a-vis the ion route inside MR - TOF it is compensated by the fact that just the same angle makes the beam revolve. In order furthermore to improve the duty cycle of optional multipath reflection or the multiple turn mass spectrometer, time to compress the beam it is possible by modulating axial direction ion speed making use of the ion guide. You can improve the residence time of the ion inside the accelerator, by shutting in the beam inside the electrostatic trap. The device which makes the residence time inside the accelerator long can improve the both of sensitivity and resolution. Selective figure Figure 1