Semiconductor-induced micro-electro-mechanical systems (MEMS) Sutchi

摘要

Topic The electric information decouple the minute electronic machine which or can inductive coupling (MEMS) there are times when the switch is offered.Solutions The inductive MEMS switch the 1st plural coils on the movable platform and is formed the platform or the baseplate which is locked from the 2nd plural coils on, the coil on the platform of mobility is on or under the coil on the fixed baseplate. Connecting or decoupling turns, or vis-a-vis the coil on the fixed baseplate the coil of the movable platform is done side by making displace. Respectively multipole and switching constitution of multi positions becomes possible depending upon the various arrangements of the coil with respect to mobility and the fixed baseplate. The above-mentioned MEMS switch, removes the problem of statical friction, akingu, and welding of the switch contact point. Using standard CMOS technique, to produce it is possible the MEMS switch of this invention.