The non-critical phase matching in the CLBO for generating a sub-wavelength 213nm

摘要

A laser illumination method, and generating a fundamental frequency laser energy of the fundamental wavelength different, such as 998nm, the method of converting to a second harmonic frequency laser energy part of the fundamental frequency laser energy, the present invention includes a first step of the method of converting further to the fourth harmonic frequency laser energy 2 harmonic frequency laser energy, it is mixed with a portion of the fundamental frequency laser energy fourth harmonic frequency laser energy, to produce a laser energy of sum frequency I include the door. Mixing is carried out by non-critical phase matching in the crystal of lithium borate cesium (CLBO). Alternatively, laser illumination method, the third harmonic is mixed with a portion of the fundamental frequency laser energy of the second harmonic frequency laser energy and / or stages of shifting to the laser energy of the Raman line a portion of the fundamental frequency laser energy can be used to generating a frequency laser energy.