METHOD OF CONTROLLING DROPLET DISCHARGE WEIGHT OF DROPLET DISCHARGE HEAD PROVIDED IN PATTERN FORMING APPARATUS AND PATTERM FORMING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method of controlling the droplet discharge weight of a droplet discharge head by which the discharge weight discharged from the droplet discharge head is made uniform and high production efficiency is attained, and a pattern forming apparatus.;SOLUTION: A glass substrate for inspection which is heated by a rubber heater 72A is provided on an inspection table, and droplets are discharged on the glass substrate to form an inspection pattern and the deposited droplets are dried. A control device 100 takes a photograph of the inspection pattern of the droplets using a drawing inspection device 80 and the image data are image-processed. The average discharge weight of the droplets discharged from each droplet discharge head 40 is calculated by the deposited surface area determined based on the diameter of the dried deposited droplets. The drive voltage Vh of a piezoelectric element PZ where the average discharge weight of the droplet is equal to a previously fixed standard discharge weight is determined, a drive wave form signal COM based on the drive voltage Vh is formed in a drive wave form generating circuit 107 to be output to a head drive circuit 108. The head drive circuit 108 drives each piezoelectric element PZ based on the drive wave form signal COM from the control device 100.;COPYRIGHT: (C)2009,JPO&INPIT