BASE MATERIAL WITH JOINING MEMBRANE, METHOD FOR MANUFACTURING BASE MATERIAL WITH JOINING MEMBRANE, JOINING METHOD AND JOINED ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a base material with a joining membrane which has a joining membrane capable of firmly joining an adherend with high dimensional accuracy and efficiently at low temperatures, a method for manufacturing a base material with a joining membrane which can manufacture such a base material with a membrane, a method of efficiently joining such a base material with a membrane to an adherend at low temperatures, and a joined article having high reliability obtained by firmly joining the above base material with a membrane to an adherend with high dimensional accuracy.;SOLUTION: The base material 1 with a membrane has a base 2 (base material) and a joining membrane 3 and can be joined to an opposing base 4 (another adherend). The joining membrane 3 comprises a metallic atom and an oxygen atom to bind to the metallic atom, and in the vicinity of its surface, a leaving group which binds to at least one of the metallic atom and the oxygen atom is introduced and by irradiation with ultraviolet rays, the leaving group present in the vicinity of the surface 35 leaves from at least one of the metallic atom and the oxygen atom to enable exhibition of the adhesion of the opposing base 4 to the surface 35 of the joining membrane 3.;COPYRIGHT: (C)2009,JPO&INPIT