Apparatus and methods for including a step of mixing with the carrier fluid in a supercritical or near-critical fluid to one, to mix the fluids at least

摘要

The present invention generally relates to a method and apparatus for mixing of fluids. More particularly, the present invention relates to a method and apparatus for mixing fluids introduced into near-critical and supercritical fluids forming a fluid stream. In the fluid stream a density gradient is generated that induces a convective velocity resulting in rapid mixing. The invention has application in such commercial applications as semiconductor and wafer fabrication where rapid cycle times or rapid mixing of fluids are required and where low tolerances for residues are permitted.