Production of the mass spectrograph device and the mass spectrograph being

摘要

From the silicon on insulator (BSOI) wafer which is connected, the method of producing the mass spectrograph which the micro engineering is done, referring to the quadripole analyzer, it is stated. Quadripole geometric form is achieved, in order to form monolithic block 410, using two BSOI wafers 200 which are connected together. Deep it was formed to outer part silicon layer feature and the spring which are etched are used in order to locate cylindrical metal electrode rod 300. Precision of the assembly is decided by the mechanical constitution extent of the silicon layer which at the same time is connected by the combination with the lithography and deep etching. It is formed by the inside silicon layer and deep the feature which is etched is used the ion entrance and in order to demarcate the ion collection optical part. In addition, it is possible to install the other feature of the fluid channel and the like.