LAYER STRUCTURE FOR FORMING SURFACE LAYER ON SURFACE OF BASE BODY, AND VAPOR DEPOSITION SOURCE FOR MANUFACTURING LAYER STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a layer structure for forming a surface of a base body, in particular, a tool subjected to abrasion, and the base body, in particular, the tool having the layer structure.;SOLUTION: In the layer structure including at least one first hard layer with the composition [M_oSi_pAY_q]γ[N_rC_sO_t]δ, AY denotes at least one element selected from a group consisting of Mn, Fe, Co, Ni and Cu, elements in the second group IIIb, elements of main groups Ia, IIa and IIIa, and elements of lanthanoid series in the periodical table of elements, where (o+p+q)=γ, (r+s+t)=δ, and (γ+δ)=100, 40≤γ≤60; and M denotes a metal of at least one selected from the group consisting of Al and elements of the second groups IVb, Vb and VIb of the periodical table of elements.;COPYRIGHT: (C)2009,JPO&INPIT