Temperature characteristic setting method and angular velocity sensor of angular velocity sensor

摘要

The piezoelectric oscillator (31) temperature characteristic of the detuning frequency which is difference of oscillation frequency of the oscillating circuit which is included and frequency of electromotive pressure of the piezoelectric oscillator which originates in Coriolis power is obtained, relationship of the sensitivity for detuning frequency is sought, temperature characteristic of the detection phase which is difference of Coriolis signal phase and the oscillation signal phase which are phase angle of the electromotive pressure signal is obtained, relationship of the sensitivity for detection phase is sought, way with the sensitivity change for the temperature variation regarding detection phase, the sensitivity change for the temperature variation regarding detuning frequency is controlled, the shift quantity of detection phaseIt decides.