The 1st electric field impression expedient which includes the 2nd electric field

摘要

PROBLEM TO BE SOLVED: To provide a measuring device capable of simply measuring the electrical characteristic of a semiconductor substrate to be measured.;SOLUTION: The probe 1 is provided with concentric circle-like insulating layers 10a, 10b, 10c in a cross-section round shape, a liquidity conductor 2 inserted to a hollow part 11a in the insulating layer 10a, a solid conductor 3 inserted in a hollow part 11b between the insulating layers 10a, 10b, and a liquidity conductor 4 inserted to a hollow part 11c between the insulating layers 10b, 10c. The end face of the probe 1 is made to come close to the surface of the p-type semiconductor layer 22 of a semiconductor substrate 20 to be measured at the time of measuring electrical property. Under the circumstances, the liquidity conductors 2, 4 are made to project from the end face, and to come close to the surface of the p-type semiconductor layer 22. Further, predetermined voltage is impressed to these liquidity conductors 2, 4 and the solid conductor 3 from a first and a second variable voltage sources 41, 42. The electrical property of the semiconductor substrate 20 (p-type semiconductor layer 22) is acquired by measuring current value, using an ammeter 43 connected to the liquidity conductor 2.;COPYRIGHT: (C)2006,JPO&NCIPI