Measurement equipment null of property of the sample which uses the heterodyne laser Doppler interferometer which possesses the optical oscillation function

摘要

PROBLEM TO BE SOLVED: To provide a definite heterodyne laser Doppler interferometer with an optical excitation function for a sample, with a simple constitution.;SOLUTION: In the heterodyne laser Doppler interferometer with the optical excitation function for the sample, the sample is irradiated with modulated light rays using the output signal of the heterodyne laser Doppler interferometer, the vibration of the sample is excited by the irradiated light rays, and the frequency characteristics or the mechanical characteristics of the sample are measured.;COPYRIGHT: (C)2006,JPO&NCIPI