Oblique incidence interferometer fringe pattern discriminator

摘要

In order to discriminate the interference pattern to which information of each type includes the information of even characteristic and the thickness fluctuation optical permeable plane surface parallel test flatly regarding and, is superimposed, it seeks with the oblique incidence interferometer which is altered. It can change the skimming over angle of the interferometer, unique modulation frequency of local interference fringes strength inside the interference pattern which is superimposed is identified. The local interference fringes strength which originates in the interference pattern which differs is identified by the respective modulation frequency.