As as it evaporates the functional pigment

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a functional organic thin film with high oxidation resistance and heat resistance, and superior in controllability of film formation.;SOLUTION: The method for manufacturing the functional organic thin film on a substrate comprises, under a vacuum condition, a step of evaporating a functional pigment from an evaporation source and evaporating a monomer from another evaporation source, a step of generating an active species by irradiating an ionizing radiation to the evaporated monomer, and a step of co-depositing the monomer generated with the active species and the evaporated functional pigment on the substrate.;COPYRIGHT: (C)2005,JPO&NCIPI