Manufacturing method of the servo valve proportional valve with a hydrostatic bearing, servo valve, or proportional valve

摘要

PROBLEM TO BE SOLVED: To provide a proportional valve and a servo valve with a static pressure bearing mechanism which can perform highly precise position control, and a method of forming a static pressure bearing.;SOLUTION: The static pressure bearings are provided on lands 18a, 18c of a spool 18 which is movable within a sleeve 16. The static pressure bearings include surface-drawing 34, 40 formed on the outer peripheral surfaces of the respective lands 18a, 18c. Gas supply pressure is introduced from a supply port PS to the surface-drawing 34, 40.;COPYRIGHT: (C)2004,JPO&NCIPI