Non-contact physical amount measuring method and physical amount measurement equipment and semiconductor device.

摘要

PROBLEM TO BE SOLVED: To provide a measurement method and a means for eliminating attachment of a large communicator for hardly and directly picking up a signal such as an internal temperature of a rotational element such as a vehicle tire, etc., due to an intervention of a rotational shaft and having a power supply. ;SOLUTION: An electromagnetic wave with a predetermined frequency is radiated to a small semiconductor element internally attached to a measured object, and constituted so as to change a resonance frequency by a physical quantity such as a temperature, pressure, etc. The physical quantity is measured by detecting the resonance by using a receiver.;COPYRIGHT: (C)2004,JPO