Diamond electromagnetic radiation cathode, electronic emitter, electron microscope and electron beam exposure machine

摘要

The electromagnetic radiation cathode whose energy width is narrow at the high brightness which uses the diamond, it designates that the electronic emitter, and the electronic equipment which uses these are offered as purpose. The diamond electromagnetic radiation cathode by this invention being the diamond electromagnetic radiation cathode which at least possesses the monocrystal diamond in part, is prismatic the particular diamond electromagnetic radiation cathode has the acute section in one place of the electromagnetic radiation section, the kinds which are constituted by the semiconductor where electric character of two types or more differs at least, form the said semiconductor the n type impurity to be the n type semiconductor which 2 1015 cm ^-3 or more is included, be the p type semiconductor to which already kinds 2 1015 cm ^-3 or more include the p type impurity, the said n type semiconductor connecting with the said p type semiconductorThe time, in order for the electron to flow to the said p type semiconductor from the said n type semiconductor due to the electric current introduction terminal of pair, negative electric potential is impressed in the said n type semiconductor vis-a-vis the said p type semiconductor, at the same time said n type semiconductor features that the component where the electron flows to the aforementioned electromagnetic radiation section is contained.