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Combined Feature Creation to Increase Data Mining Signal in Hybrid Datasets
Combined Feature Creation to Increase Data Mining Signal in Hybrid Datasets
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机译:组合特征创建以增加混合数据集中的数据挖掘信号
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摘要
Embodiments of the invention may be used to produce a data mining signal by generating hybrid dataset representing data related to tools used during a semiconductor fabrication process. By selectively combining similar processes, the data mining signal strength of each tool used to perform the steps of the fabrication process may be increased. A combined process variable may be used to represent the group of tools and processes, collectively. A set of rules may be composed to determine which processes used in the semiconductor fabrication process should be combined in the hybrid dataset.
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