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6K pulse repetition rate and above gas discharge laser system solid state pulse power system improvements

机译:6K以上脉冲重复频率及以上气体放电激光系统固态脉冲电源系统的改进

摘要

A method and apparatus for operating a very high repetition gas discharge laser system magnetic switch pulsed power system is disclosed, which may comprise a solid state switch, a charging power supply electrically connected to one side of the solid state switch; a charging inductor electrically connected to the other side of the solid state switch; a deque circuit electrically in parallel with the solid state switch comprising a deque switch; a peaking capacitor electrically connected to the charging inductor, a peaking capacitor charging control system operative to charge the peaking capacitor by opening the deque switch and leaving the solid state switch open and then shutting the solid state switch. The solid state switch may comprise a plurality of solid state switches electrically in parallel.
机译:公开了一种用于操作非常高的重复气体放电激光系统磁性开关脉冲电源系统的方法和设备,该方法和设备可以包括固态开关,电连接到固态开关的一侧的充电电源;电连接到固态开关的另一侧的充电电感器;与固态开关电并联的双端电流电路,其包括双端电流开关。一个峰值电容器电连接到充电电感器,一个峰值电容器充电控制系统用于通过打开双端队列开关并使固态开关断开然后关闭固态开关来为峰值电容器充电。固态开关可以包括并联电连接的多个固态开关。

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