Techniques are described for reducing the number of shots in a fractured layout design. Each polygon in a layout design is examined for “jogs.” For each identified jog, the surrounding region is examined to determine if there is an opposing jog or parallel edge that can be aligned with the identified jog. The surrounding region then is examined for any polygon features, such as edges or vertices, which might restrict or prevent the alignment of the identified jog with the opposing jog or edge. If the identified jog can be aligned with an opposing jog or edge without violating a specified alignment constraint, then those jogs are deemed an alignable jog pair. Next, one or more of the alignable jog pairs is selected for alignment. The alignable jog pairs may be selected for alignment based upon their impact on the size of the polygon when aligned. Once one or more of the alignable jog pairs have been selected, then the layout design data will be modified to align the selected jog pairs.
展开▼
