首页> 外国专利> DEVELOPING BIAS CONTROL DEVICE CAPABLE OF PROPERLY CONTROLLING DEVELOPING BIAS VOLTAGE

DEVELOPING BIAS CONTROL DEVICE CAPABLE OF PROPERLY CONTROLLING DEVELOPING BIAS VOLTAGE

机译:能够正确控制偏置电压的开发偏置控制设备

摘要

Upon receiving a request to control developing bias voltage, first and second square-wave signal output units output first and second square-wave signals, respectively. When a rising edge of the first square-wave signal coincides with a rising edge of the second square-wave signal, the rising edge of the second square-wave signal is advanced with respect to the rising edge of the first square-wave signal. When a falling edge of the first square-wave signal coincides with a falling edge of the second square-wave signal, the falling edge of the second square-wave signal is delayed with respect to the falling edge of the first square-wave signal. Subsequently, a voltage-controlling square-wave signal for controlling developing bias voltage is generated based on the first and second square-wave signals.
机译:在接收到控制显影偏压的请求时,第一和第二方波信号输出单元分别输出第一和第二方波信号。当第一方波信号的上升沿与第二方波信号的上升沿一致时,第二方波信号的上升沿相对于第一方波信号的上升沿前进。当第一方波信号的下降沿与第二方波信号的下降沿一致时,第二方波信号的下降沿相对于第一方波信号的下降沿被延迟。随后,基于第一和第二方波信号产生用于控制显影偏压的电压控制方波信号。

著录项

  • 公开/公告号US2009220265A1

    专利类型

  • 公开/公告日2009-09-03

    原文格式PDF

  • 申请/专利权人 KOJI FUJII;

    申请/专利号US20090392157

  • 发明设计人 KOJI FUJII;

    申请日2009-02-25

  • 分类号G03G15/06;

  • 国家 US

  • 入库时间 2022-08-21 19:35:22

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