Transformer for impedance-matching power output of RF amplifier to gas-laser discharge

摘要

An RF impedance-matching transformer for matching the output impedance of an RF amplifier to the discharge of a gas-discharge laser includes upper and lower dielectric plates arranged face-to-face and bonded together. A primary U-shaped strip winding is embedded in the bonded surface of one of the dielectric plates. A secondary strip-winding is formed on an exposed surface of the upper dielectric plates. A ground-plane electrode formed on an exposed surface of the lower dielectric plate. An electrical connector connects one end of the secondary strip-winding to the ground-plane electrode via a via-hole extending through the dielectric plates. The other end of the secondary strip-winding can be connected to the laser.