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Pressure sensor with reduced size strain gauge mounting structure and manufacturing method of the same
Pressure sensor with reduced size strain gauge mounting structure and manufacturing method of the same
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机译:减小尺寸的应变计安装结构的压力传感器及其制造方法
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摘要
A pressure sensor for detecting pressure includes: a metallic diaphragm for receiving the pressure; four strain gauges providing a Wheatstone bridge, wherein each strain gauge outputs an electric signal corresponding to deformation of the diaphragm when the diaphragm is deformed by the pressure; and four semiconductor chips corresponding to four strain gauges, wherein each strain gauge is disposed in the semiconductor chip. Each semiconductor chip is mounted on the diaphragm.
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