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System and method for conducting adaptive fourier filtering to detect defects in dense logic areas of an inspection surface
System and method for conducting adaptive fourier filtering to detect defects in dense logic areas of an inspection surface
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机译:进行自适应傅里叶滤波以检测检查表面的密集逻辑区域中的缺陷的系统和方法
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摘要
A dark field surface inspection tool and system are disclosed herein. The tool includes an illumination source capable of scanning a light beam onto an inspection surface. Light scattered by each inspection point is captured as image data by a photo detector array arranged at a fourier plane. The images captured are adaptively filtered to remove a portion of the bright pixels from the images to generate filtered images. The filtered images are then analyzed to detect defects in the inspection surface. Methods of the invention include using die-to-die comparison to identify bright portions of scattering patterns and generate unique image filters associated with those patterns. The associated images are then filtered to generate filtered images which are then used to detect defects. Also, data models of light scattering behavior can be used to generate filters.
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