Liquid crystal on silicon (LCOS) display device having a uniform cell gap

摘要

A liquid crystal on silicon (LCOS) device includes a wafer, glass, and walls formed at opposite ends of an upper surface of the wafer to define a predetermined cell gap between the glass and the wafer. A thin piezo-electric layer is attached onto a surface of the wafer and an electrode is applied with external power to expand and/or contract the thin piezo-electric layer. The LCOS device further includes a voltage detection unit for detecting a voltage generated by the deformation of the thin piezo-electric layer; and a feedback control unit for compensating for deformation of the thin piezo-electric layer according to the voltage detected by the voltage detection unit. The LCOS device achieves uniformity of the cell gap by adjusting the voltage level of the thin piezo-electric layer after bonding the wafer and the glass, and therefore, spacers are not required.