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Positive-working photosensitive composition and pattern forming method using the same
Positive-working photosensitive composition and pattern forming method using the same
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机译:阳图型感光性组合物及其图案形成方法
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摘要
A positive-working photosensitive composition that includes (A) a resin containing repeating units having diamantane structures and capable of decomposing under action of an acid to increase solubility in an alkali developer, (B) a compound capable of generating a specific organic acid upon irradiation with an actinic ray or radiation, and (C) a solvent.
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